Semiconductor production tools - horizontal diffusion furnaces, gas delivery systems
(Products & services - Detail)
Company profile :
SVCS specializes in refurbishing, service and manufacturing of semiconductor production tools - atmospheric furnaces, furnaces for CVD processes, and epitaxial reactors. These tools are equipped with SVCS own components (control unit, high voltage electronics, gas systems) as well as with components and subsystems (especially fine mechanical parts and heat sources) made by the world`s leading manufacturers. The SVCon control system fulfills not only functionality requirements but also safety rules. The newly developed versatile gas interface board, manual override service console, data supervisor and acquisition software are integral parts of the system.
SVCS manufactures also gas panels in a Class 100/10-cleanroom facility for orbital welding. All manufactured parts and components are tested for leakage by a helium leak detector. In-house engineering of gas panels, tailored to the individual needs of customers, is performed with a 3D CAD design station. SVCS designs and manufactures gas panels using components such as mini weld fittings and face seal fittings, tubing, pressure regulators, springless manual and pneumatic shut-off diaphragm valves, springless check valves and other pressure and flow control components.
Product, Service :
Horizontal diffusion furnaces for atmospheric and LPCVD processes
Gas delivery systems for special gases
The company is looking for :
Business partners interested in buying production tools for semiconductor industry
Optátova 37
63700 Brno
Czech Republic
